Equipment Introduction
Yihexing four door four control automatic door oven is a high-precision heat treatment automation equipment designed specifically for semiconductor industry production. It integrates functions such as automation control, vacuum environment, oxygen free protection, dust-free operation, and efficient cooling to ensure the accuracy of the baking process and the high quality of the products. The oven has the ability to automatically open and close doors, cooperate with AGV (Automated Guided Vehicle) or wafer robotic arms, achieve automated loading and unloading actions, improve production efficiency and reduce manual operations, and is suitable for small batch automated continuous production applications. And it has safety functions such as self diagnostic circuit, over rise protector, leakage protection switch, etc. Mainly used in processes such as drying, curing, aging, and heat treatment of materials, it is widely used in fields such as semiconductor wafers, glass substrates, precision packaging, precision electronics, and new materials.

Equipment features
●High precision temperature controller with PID regulation, with a control accuracy of up to 0.5 ℃, ensuring temperature uniformity and stability during the baking process.
●Adopting an automated control system, integrating PLC programmable logic controller and high-definition touch screen operation interface, to achieve fully automated management of oven operation.
●Multi cavity integrated structure, suitable for cooperating with automated whole line projects, can achieve local data storage, real-time data communication with MES, and linkage with robotic arm movements.
●Each chamber can work independently and adopts automatic opening and closing doors, which can work in conjunction with wafer robots or AGV automatic guidance vehicles to achieve automated loading and unloading actions, suitable for small batch automated continuous production applications.
●Compatible with vacuum and nitrogen environment control, achieving oxygen free and dust-free baking, with a working vacuum range of 101kPa-10-5Pa, low residual O2 (<20ppm), dust-free baking (class100) suitable for baking processes with extremely high environmental requirements.
●Equipped with intelligent PID automatic constant temperature control, it can set startup timing, constant temperature timing, automatic alarm and disconnection of heating element when time expires, automatic alarm and disconnection of heating element when overheating occurs, power phase loss protection, etc.

●The number of cavities, door opening and closing methods, control methods, automation methods, and communication methods can be customized according to project requirements.

application area
●Baking of glass substrates, including high-temperature baking to cure surface coatings or remove moisture.
●The pre baking, soft baking, and hard film baking steps of semiconductor wafers in processes such as photolithography, coating, and coating.
●The baking and curing process of LED chips and photovoltaic cells ensures the physical and chemical stability of the materials.
●During the manufacturing process of lithium-ion batteries, vacuum baking is used for electrode plates and batteries to ensure the drying and solidification of materials.
●In the optical coating process, it is used to bake optical lenses and other optical components to ensure the uniformity and adhesion of the coating.
●The aging, annealing, testing, curing, drying and other processes of electronic components ensure product quality and performance.
●PI (polyimide) curing, silver and photoresist curing, moisture sensitive film baking in gold plating schemes, high-temperature annealing of silicon wafers (wafers), etc.
●In the development and testing of new materials, high temperature and oxygen free environments can be provided to study the reactions and changes of materials under specific conditions.